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摘要: MEMS毫米波相移器是MEMS毫米波相控阵天线的关键部件之一,它的性能直接决定了毫米波相控阵天线的性能。该文介绍毫米波MEMS相移器的设计,研究低损耗衬底,Au,AlxSi1-x可动膜对下拉电压和传输损耗的影响,测试表明:21桥相位连续可调的分布式压控开关阵列一毫米波相移器在35GHz时,启动电压5V,20V时相移量达到372o/3. 5 mm,并能在不同的控制电压下根据要求改变相移量。Abstract: Several designs of MEMS millimeter-wave phase shifters are presented in this paper. They consist of a coplanar wave-guide (CPW) transmission line periodically loaded with 8-32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. 21Al0.96Si0.04 bridges MEMS Phase shifter reached to 372(/3. 5mm under 20V bias at 35 GHz, the with an insertion lose (S21) of about 4-7 dB.
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