用于高空气象探测的聚酰亚胺薄膜湿敏电容研究

卞晓月; 张健; 王剑平; 吉淳; 吴一奇

用于高空气象探测的聚酰亚胺薄膜湿敏电容研究

1.
华东师范大学~~信息科学技术学院, 上海 200241;
2.
上海长望气象科技有限公司, 上海201209

详细信息

中图分类号: TP212
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出版历程
- 收稿日期: 2013-09-01
- 修回日期: 2013-12-01
- 刊出日期: 2014-07-25

Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation

1.
School of Information Science Technology, East China Normal University, Shanghai 200241, China;
2.
Changwang Meteorological Science and Technology Co., Ltd., Shanghai 201209, China

摘要

摘要: 设计制作了一种基于MEMS技术, 可应用于高空湿度探测的薄膜湿敏电容. 电容采用三明治结构, 聚酰亚胺薄膜作为湿度敏感层材料, 金作为上、下电极. 测试结果表明, 在15{\%}RH$\sim $95{\%}RH的全量程范围内, 湿敏电容的合格率$\geqslant $80{\%}, 灵敏度约为0.29pF/{\%}RH, 线性误差$$1.5{\%}RH, 湿滞较小, 响应时间小于4~s, 温度系数好, 具有良好的长期稳定性. 研究表明, 制作的湿敏电容综合指标良好, 适合批量生产, 可以满足高空气象探测要求.
- 湿度传感器 /
- 湿敏电容 /
- 聚酰亚胺 /
- MEMS
Abstract: Based on MEMS technology, a design of humidity sensitive capacitor was described. The capacitor employed sandwich structure, i.e. polyimide was used as the humidity sensitive material and gold was used as the electrodes. Capacitor shows a good pass rate of 80{\%}. As can be seen from the measurements, over the testing range from 15{\%} RH to 95{\%} RH, the maximum linearity error is 1.5{\%} RH. The sensitivity reaches 0.29pF /{\%} RH. The hysteresis is small, and the sensor has fast response time of 4~s. Meanwhile, capacitor shows good temperature coefficient and long-term stability. The results show that the comprehensive indexes of humidity capacitor are satisfactory. The capacitor is suitable for batch fabrication and can be used for high altitude meteorological observation.
- humidity sensor /
- humidity sensitive capacitor /
- polyimide /
- MEMS

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参考文献(1)

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