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LIAO Bin, ZHANG Lian, AN Tong-yi, ZHU Shou-zheng. Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2005, (2): 52-57.
Citation:
LIAO Bin, ZHANG Lian, AN Tong-yi, ZHU Shou-zheng. Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2005, (2): 52-57.
LIAO Bin, ZHANG Lian, AN Tong-yi, ZHU Shou-zheng. Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2005, (2): 52-57.
Citation:
LIAO Bin, ZHANG Lian, AN Tong-yi, ZHU Shou-zheng. Study on Microwave Plasma Excitation in a Cylindrical Cavity(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2005, (2): 52-57.
According to resonant theory, it was justified that TM01p was the main mode in a cylindrical cavity . Finite difference time domain(FD-TD)in cylindrical coordinate system was used to simulate the electromagnetic field distributions inside the reactor to improve performances. The experimental results are in good agreement with the theoretical predictions.