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GUO Fang-min, ZHU Shou-zheng, WEI Hua-zheng, ZHENG Ying, ZHU Rong-jing, XIN Pei-sheng, ZHU Zi-qiang, LAI Zong-sheng, YANG Gen-qing, LU Wei. The Study of MEMS Millimeter Wave Phase Shifter[J]. Journal of East China Normal University (Natural Sciences), 2004, (1): 49-55.
Citation:
GUO Fang-min, ZHU Shou-zheng, WEI Hua-zheng, ZHENG Ying, ZHU Rong-jing, XIN Pei-sheng, ZHU Zi-qiang, LAI Zong-sheng, YANG Gen-qing, LU Wei. The Study of MEMS Millimeter Wave Phase Shifter[J]. Journal of East China Normal University (Natural Sciences), 2004, (1): 49-55.
GUO Fang-min, ZHU Shou-zheng, WEI Hua-zheng, ZHENG Ying, ZHU Rong-jing, XIN Pei-sheng, ZHU Zi-qiang, LAI Zong-sheng, YANG Gen-qing, LU Wei. The Study of MEMS Millimeter Wave Phase Shifter[J]. Journal of East China Normal University (Natural Sciences), 2004, (1): 49-55.
Citation:
GUO Fang-min, ZHU Shou-zheng, WEI Hua-zheng, ZHENG Ying, ZHU Rong-jing, XIN Pei-sheng, ZHU Zi-qiang, LAI Zong-sheng, YANG Gen-qing, LU Wei. The Study of MEMS Millimeter Wave Phase Shifter[J]. Journal of East China Normal University (Natural Sciences), 2004, (1): 49-55.
Department of Electrical Engineering, East China Normal University, Shanghai 200062,China2. State key Lab. of Transducer Technology Shanghai Institute of Metallurgy，Chinese Academy of Sciences Shanghai 200050,China 3. State Key Lab. of Transducer Tech，Shanghai Institute of Metallurgy，Chinese Academy of Science, Shanghai 200083, China
Several designs of MEMS millimeter-wave phase shifters are presented in this paper. They consist of a coplanar wave-guide (CPW) transmission line periodically loaded with 8-32 metal bridges, functioning as capacitive switches. Every switching element consists of a thin metallic membrane actuated by applied bias. Remarkable phase shifter performances were observed. 21Al0.96Si0.04 bridges MEMS Phase shifter reached to 372(/3. 5mm under 20V bias at 35 GHz, the with an insertion lose (S21) of about 4-7 dB.
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