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ZHANG Yong-hua, LIU Lei, DING Gui-fu, CAI Bing-chu, LAI Zong-sheng. Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2007, (5): 118-122.
Citation:
ZHANG Yong-hua, LIU Lei, DING Gui-fu, CAI Bing-chu, LAI Zong-sheng. Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2007, (5): 118-122.
ZHANG Yong-hua, LIU Lei, DING Gui-fu, CAI Bing-chu, LAI Zong-sheng. Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2007, (5): 118-122.
Citation:
ZHANG Yong-hua, LIU Lei, DING Gui-fu, CAI Bing-chu, LAI Zong-sheng. Dynamic Characterization of an Innovative RF MEMS Switch(Chinese)[J]. Journal of East China Normal University (Natural Sciences), 2007, (5): 118-122.
Due to the use of permanent magnet in structure,a bistable electromagnetic radio frequency microelectromechanical systems (RF MEMS) switch based on UVLIGA technology requires no energy to remain at “on” or “off” state. And the electromagnetic actuation with low power consumption can be achieved.The dynamic characterization of the switch was successfully measured using DMEMS dynamic measurement system attached to wyko NT1 100 optical profiling system supplied by Veeco instruments Co.,Ltd.The results of test showed that the bistable electromagnetic actuation is achieved, and the switching time is less than 20 μs.