Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation

BIAN Xiao-yue; ZHANG Jian; WANG Jian-ping; JI Chun; WU Yi-qi

Issue 4

Jul. 2014

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Article Navigation > Journal of East China Normal University (Natural Sciences) > 2014 > (4): 69-76

BIAN Xiao-yue, ZHANG Jian, WANG Jian-ping, JI Chun, WU Yi-qi. Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation[J]. Journal of East China Normal University (Natural Sciences), 2014, (4): 69-76.

Citation:

BIAN Xiao-yue, ZHANG Jian, WANG Jian-ping, JI Chun, WU Yi-qi. Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation[J]. Journal of East China Normal University (Natural Sciences), 2014, (4): 69-76.

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Study on polyimide film humidity sensitive capacitor for high altitude meteorological observation

1.
School of Information Science Technology, East China Normal University, Shanghai 200241, China;
2.
Changwang Meteorological Science and Technology Co., Ltd., Shanghai 201209, China

Received Date: 2013-09-01
Rev Recd Date: 2013-12-01
Publish Date: 2014-07-25

Abstract

Abstract

Based on MEMS technology, a design of humidity sensitive capacitor was described. The capacitor employed sandwich structure, i.e. polyimide was used as the humidity sensitive material and gold was used as the electrodes. Capacitor shows a good pass rate of 80{\%}. As can be seen from the measurements, over the testing range from 15{\%} RH to 95{\%} RH, the maximum linearity error is 1.5{\%} RH. The sensitivity reaches 0.29pF /{\%} RH. The hysteresis is small, and the sensor has fast response time of 4~s. Meanwhile, capacitor shows good temperature coefficient and long-term stability. The results show that the comprehensive indexes of humidity capacitor are satisfactory. The capacitor is suitable for batch fabrication and can be used for high altitude meteorological observation.
- humidity sensor,
- humidity sensitive capacitor,
- polyimide,
- MEMS

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References(1)

References

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